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Zariadenia

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tem:procedures

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Procedures

Start work

  • HT→FEG Standby Mode→Normal (it takes ~13min)
  • Mount sample
  • Check nitrogen pressure!
  • Insert holder till the first notch Air→Pump (wait for green light)
  • Fill ACD with liquid nitrogen (in two steps)
  • Fully insert holder
  • Select holder type!

End work

  • Stage Neutral
  • Check nitrogen pressure!
  • Pull holder till last notch
  • Pump→Air, wait for nitrogen and remove the holder
  • Mount ACD heater, Maintenance→ACD & Bake→ACD Heat→ON (turns off automatically)
  • HT→FEG Standby Mode→Standby

Alignment

  • GUNA(F3) Spot1 center with SHIFT ↔ BRIGHT TILT Spot5 center with SHIFT
  • GUNA(F3) and Anode wobler(F5) make symetric with DEF
  • COND STIG: make round with DEF
  • Tilt and shift purity
  • STD FOCUS adjust Z (minimal contrast, no hallo, or no motion with IMAGE WOBB)
  • OBJ wobler (F4) make feature stationary with DEF(BRIGHT TILT)
  • make fft round with DEF(OBJ STIG)
  • SPECTRUM→move ZLP to center using FL lens
  • Filter→Slit→IN move slit to center using position
  • back to IMAGE, center circle with Isochromacity
  • center diffraction win DEF(PLA)

After bakeout

  • Cycle BEAM VALVE with HT OFF
  • Open EDX detector valve with BEAM VALVE closed
  • HT→HT Conditioning→Auto Procedure→Start (it takes ~60 min)

Beam shower

  • ?

After (brief) power failure

  • reset chiller complaining about closed outlet
  • press (longer) “I” on the front of the microscope
  • watch vacuum
  • HT → Auto HT & Emission → Start up

Normal vacuum levels

Column/PIG1 ~25 uA SIP starts at ? uA
Specimen/PIG4 ~25 uA ~250 uA without holder, pump LED goes green at 28 uA
Camera/PIG3 ~25 uA
RT1/PIG5 ~80 uA
RT2/PIG6 ~25 uA
20l SIP <1 uA
60l SIP ~1 uA
Column SIP 200 uA 800 uA with specimen without LN2 in ACD
tem/procedures.1454927084.txt.gz · Last modified: 2021/10/25 08:53 (external edit)