Table of Contents

Procedures

Start work

End work

Alignment

After bakeout

Beam shower

After power failure

Normal vacuum levels

Column/PIG1 ~25 uA SIP starts at ? uA
Specimen/PIG4 ~25 uA ~250 uA without holder, pump LED goes green at 28 uA
Camera/PIG3 ~25 uA
RT1/PIG5 ~80 uA
RT2/PIG6 ~25 uA
20l SIP <1 uA
60l SIP ~1 uA
Column SIP 200 uA 800 uA with specimen without LN2 in ACD